Interaction | Reaction | Process     Data Page

Trichlorosilane is decomposed to polycrystalline silicon and hydrogen chloride.

This process is used in the conversion metallurgical grade silicon to electronic grade silicon.

W. Büchner, R. Schliebs, G. Winter, K.H. Büchel, Industrial Inorganic Chemistry, VCH, 1989
SiHCl3
  +  
H2
         
Si
  +  
3
HCl
Reactant Page Go To Go To
Trichlorosilane     Reactions Using    Reactions Forming
Hydrogen     Reactions Using    Reactions Forming
Silicon     Reactions Using    Reactions Forming
Hydrogen chloride     Reactions Using    Reactions Forming

Interaction, Reaction, Process defined as:
Decomposition by Heat (Pyrolysis)
Industrial Process: Inorganic

© Mark R. Leach 1999 –

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