Interaction | Reaction | Process Data Page
Trichlorosilane is decomposed to polycrystalline silicon and hydrogen chloride.This process is used in the conversion metallurgical grade silicon to electronic grade silicon.
W. Büchner, R. Schliebs, G. Winter, K.H. Büchel, Industrial Inorganic Chemistry, VCH, 1989
|Reactant Page||Go To||Go To|
|Trichlorosilane||Reactions Using||Reactions Forming|
|Hydrogen||Reactions Using||Reactions Forming|
|Silicon||Reactions Using||Reactions Forming|
|Hydrogen chloride||Reactions Using||Reactions Forming|
|Interaction, Reaction, Process defined as:|
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